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STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
설명
설명 없음
환경 설정
Model = MESC Multiplex ICP ASE Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch) Description of Process = ASE (Advanced Silicon Etch, Bosch Process) Wafer Size = 150mm Loader capacity = 2 wafer Carousel Chuck Type = Mechanical Weighted Clamp Process Gases: C4F8 = 300 Sccms SFG = 600 Sccms O2 = 100 Sccms AR = 100 Sccms Turbo Pump = Leybold Mag 2000 CT RF Generator 1 = ENI ACG-3 RF Generator 2 = AE RFG 3001 (Advanced Energy) Vacuum measurement = MKS Instruments Gate Valve = VAT Throttling Gate Valve Slit Valve = Vat Slit Valve Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue Vacuum Pump Loadlock = Edwards Pump E2M40 Vacuum Pump Process Module = Edwards IQDP80 w/IQDB250 Blower (intelligent Interface) Chiller = Affinity, PWG-060K-BE33CBC2
OEM 모델 설명
The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
문서

문서 없음

카테고리
Dry / Plasma Etch

마지막 검증일: 60일 이상 전

주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

64816


웨이퍼 사이즈:

6"/150mm


빈티지:

2001


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

STS

MULTIPLEX ICP

verified-listing-icon
검증됨
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
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주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

64816


웨이퍼 사이즈:

6"/150mm


빈티지:

2001


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음
환경 설정
Model = MESC Multiplex ICP ASE Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch) Description of Process = ASE (Advanced Silicon Etch, Bosch Process) Wafer Size = 150mm Loader capacity = 2 wafer Carousel Chuck Type = Mechanical Weighted Clamp Process Gases: C4F8 = 300 Sccms SFG = 600 Sccms O2 = 100 Sccms AR = 100 Sccms Turbo Pump = Leybold Mag 2000 CT RF Generator 1 = ENI ACG-3 RF Generator 2 = AE RFG 3001 (Advanced Energy) Vacuum measurement = MKS Instruments Gate Valve = VAT Throttling Gate Valve Slit Valve = Vat Slit Valve Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue Vacuum Pump Loadlock = Edwards Pump E2M40 Vacuum Pump Process Module = Edwards IQDP80 w/IQDB250 Blower (intelligent Interface) Chiller = Affinity, PWG-060K-BE33CBC2
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The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
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