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STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
설명
Condition: Complete / Working at removal Status: De-installed
환경 설정
STS Multiplex ICP AOE Pro Advanced Oxide Etcher (AOE) Etched: SiO2, quartz, Pyrex, fused silica, Si3N4, bulk silicon Masks: Si, PR & Metals (Cr, Ti, Ni) 3000W 13.56MHz AE – Coil 1000W 13.56MHz ENI – Platen Backside Helium Cooling with Standard 8-pin clamp & lip seal C4F8, SF6, O2, H2, CF4, two open gas slots 2-80mT Process Pressure Platen -20°C to 120°C, Walls 100°C, Lid 120°C 2.5µm isolated trenches on 8-10µm TEOS Etch rate greater than 2000Å/min SiO2, greater than 4:1 selectivity SiO2: PR, etch rate variability intra- and inter-wafer ±3%, sidewalls 85-90° 5µm features on 3-10µm SiO2 Etch rate greater than 3000Å/min SiO2, greater than 7.5:1 selectivity SiO2:PR, etch rate variability intra- and inter-wafer ±2%, sidewalls 89-90° Converted to 100mm w/ ceramic parts (from quartz)
OEM 모델 설명
The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
문서

문서 없음

카테고리
Dry / Plasma Etch

마지막 검증일: 60일 이상 전

주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

111180


웨이퍼 사이즈:

2"/50mm, 4"/100mm, 6"/150mm


빈티지:

알 수 없음


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

STS

MULTIPLEX ICP

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검증됨
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
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주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

111180


웨이퍼 사이즈:

2"/50mm, 4"/100mm, 6"/150mm


빈티지:

알 수 없음


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Condition: Complete / Working at removal Status: De-installed
환경 설정
STS Multiplex ICP AOE Pro Advanced Oxide Etcher (AOE) Etched: SiO2, quartz, Pyrex, fused silica, Si3N4, bulk silicon Masks: Si, PR & Metals (Cr, Ti, Ni) 3000W 13.56MHz AE – Coil 1000W 13.56MHz ENI – Platen Backside Helium Cooling with Standard 8-pin clamp & lip seal C4F8, SF6, O2, H2, CF4, two open gas slots 2-80mT Process Pressure Platen -20°C to 120°C, Walls 100°C, Lid 120°C 2.5µm isolated trenches on 8-10µm TEOS Etch rate greater than 2000Å/min SiO2, greater than 4:1 selectivity SiO2: PR, etch rate variability intra- and inter-wafer ±3%, sidewalls 85-90° 5µm features on 3-10µm SiO2 Etch rate greater than 3000Å/min SiO2, greater than 7.5:1 selectivity SiO2:PR, etch rate variability intra- and inter-wafer ±2%, sidewalls 89-90° Converted to 100mm w/ ceramic parts (from quartz)
OEM 모델 설명
The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
문서

문서 없음