설명

Btah;

환경 설정

FM_SiN(A)

OEM 모델 설명

The TELINDY is a 300mm wafer processing platform that combines the advantages of the TELFORMULA and ALPHA(α)-303i platforms to meet the demands of high-volume thermal processing for sub-45nm technology. It offers a large 125-wafer batch size, high-speed robotics, and other improvements for cost-effective processing of various oxidation and deposited films. The TELINDY platform is suitable for a range of applications, including general oxidation/anneal, radical oxidation, LPCVD films, ultra-low temperature LPCVD applications, and high-k dielectrics. It features in-situ dry gas cleaning technology, a fast ramp-up and cool-down heater, high-speed robotics, and a large 125-wafer load size. These features make the TELINDY an excellent choice for cost-effective and efficient wafer processing.

문서

문서 없음

TEL / TOKYO ELECTRON

TELINDY

검증됨

카테고리

Furnaces / Diffusion

마지막 검증일: 30일 전

주요 품목 세부 정보

조건:

Used

작동 상태:

알 수 없음

제품 ID:

144990

웨이퍼 사이즈:

12"/300mm

빈티지:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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