설명
HDP(2 chamber)환경 설정
환경 설정 없음OEM 모델 설명
The Novellus Concept Three Speed is an advanced system designed for 300 mm wafers, boasting a proprietary hemispherical ion source and bi-polar electrostatic chuck. These innovative features ensure superior ion uniformity and precise temperature control. Even as the elements are scaled up for 300 mm wafers, the ion uniformity remains consistent due to the inherent design characteristics of the ion source. Additionally, an optimized gas delivery system enhances the overall within-wafer uniformity, further improving the system's performance.문서
문서 없음
LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED
검증됨
카테고리
PECVD
마지막 검증일: 8일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
118537
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED
카테고리
PECVD
마지막 검증일: 8일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
118537
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
HDP(2 chamber)환경 설정
환경 설정 없음OEM 모델 설명
The Novellus Concept Three Speed is an advanced system designed for 300 mm wafers, boasting a proprietary hemispherical ion source and bi-polar electrostatic chuck. These innovative features ensure superior ion uniformity and precise temperature control. Even as the elements are scaled up for 300 mm wafers, the ion uniformity remains consistent due to the inherent design characteristics of the ion source. Additionally, an optimized gas delivery system enhances the overall within-wafer uniformity, further improving the system's performance.문서
문서 없음