설명
Single Chamber RTP with 3 Load/unloaders - Operational Condition환경 설정
RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660OEM 모델 설명
The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.문서
MATTSON / STEAG / AST
3000
검증됨
카테고리
RTP/RTA
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
59225
웨이퍼 사이즈:
8"/200mm
빈티지:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기MATTSON / STEAG / AST
3000
카테고리
RTP/RTA
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
59225
웨이퍼 사이즈:
8"/200mm
빈티지:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available