설명
설명 없음환경 설정
Reticle size: 6" Square Field Size: 22 X 22 mm Exposure Light: 248 nm, DUV Light Source KrF Excimer Laser CYMER/ELS-53XX (NOT INCLUDED) Projection Magnification: 1/5 X Numerical Aperture: 0.63~0.45 Estimated Throughput: 85 wph (60 shot / 22 mm / 8” Wafer) 110 wph (32 shot / 22 mm / 6" Wafer)OEM 모델 설명
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.문서
문서 없음
CANON
FPA-3000EX5
검증됨
카테고리
Steppers & Scanners
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
117148
웨이퍼 사이즈:
4"/100mm, 6"/150mm, 8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-3000EX5
카테고리
Steppers & Scanners
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
117148
웨이퍼 사이즈:
4"/100mm, 6"/150mm, 8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Reticle size: 6" Square Field Size: 22 X 22 mm Exposure Light: 248 nm, DUV Light Source KrF Excimer Laser CYMER/ELS-53XX (NOT INCLUDED) Projection Magnification: 1/5 X Numerical Aperture: 0.63~0.45 Estimated Throughput: 85 wph (60 shot / 22 mm / 8” Wafer) 110 wph (32 shot / 22 mm / 6" Wafer)OEM 모델 설명
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.문서
문서 없음