설명
Exterior Dimensions Width 74.803 in (190.0 cm) Depth 98.425 in (250.0 cm) Height 102.362 in (260.0 cm) Weight 12,787 lb (5,800 kg)환경 설정
환경 설정 없음OEM 모델 설명
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.문서
문서 없음
카테고리
Steppers & Scanners
마지막 검증일: 오늘
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
142287
웨이퍼 사이즈:
8"/200mm
빈티지:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
CANON
FPA-3000EX5
카테고리
Steppers & Scanners
마지막 검증일: 오늘
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
142287
웨이퍼 사이즈:
8"/200mm
빈티지:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Exterior Dimensions Width 74.803 in (190.0 cm) Depth 98.425 in (250.0 cm) Height 102.362 in (260.0 cm) Weight 12,787 lb (5,800 kg)환경 설정
환경 설정 없음OEM 모델 설명
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.문서
문서 없음