설명
Asset Description - Cleaning Wafer Software Version - NA CIM - SECS / Gem Process - Cobalt backside clean환경 설정
System Type Description Quantity Status Main System SEZ203 1 OK Others NA 0 OK Factory Interface SMIF 2 OK Options System UPS 1 Handler System Robot 1 OKOEM 모델 설명
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.문서
카테고리
Wet Etch
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
137329
웨이퍼 사이즈:
8"/200mm
빈티지:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH / SEZ
SP203
카테고리
Wet Etch
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
137329
웨이퍼 사이즈:
8"/200mm
빈티지:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available