설명
설명 없음환경 설정
Direction: RIGHT HAND SIDE 4 Blocks Interfaced; Cassette, 2 Process, & Stepper Interface 4 Wafer Transfer Robot Arms; Cassette, 2 Process, & Stepper Interface Control Module on cassette end station (CES) 3 Station 25 wafer FOUP Interface is to Ultratech T-300 Cassette rotators and platforms Facility sensors for DI water and Caustic exhaust Coater (COT) - quantity 1 Coater (PCT) - quantity 2 2 Nozzles w/ Temperature Control Chuck vacuum sensor Millipore P-250 pumps SS 0.3mm diameter side rinse nozzle w/ flow meter 1 set of 2 SS 0.3mm diameter back rinse nozzles 1 SS 0.3mm diameter back rinse nozzle for chemical 1 1 SS 0.3mm diameter back rinse nozzle for chemical 2 Bulk-FSI system for side and back rinse PTI mass flow controller per module PP cup w/ sensor Chuck Up VAC Off Switch Addition of drip traysOEM 모델 설명
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.문서
TEL / TOKYO ELECTRON
ACT 12
검증됨
카테고리
Coaters & Developers
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled
제품 ID:
100270
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
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TEL / TOKYO ELECTRON
ACT 12
카테고리
Coaters & Developers
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled
제품 ID:
100270
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available