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TEL / TOKYO ELECTRON TELIUS SP 305 SCCM
    설명
    Process: Oxide Etch No HDD
    환경 설정
    TEL Telius SP-305 SCCM ➢ 4 Chambers ➢ 5 Load Ports ➢ Turbo Pumps: Shidmazhu TMP-3403LMC-T4(VG300) (Qty.4) ➢ FOUP Opener: SELOP 12F25-30U-14 ➢ Purge: N2 (Process Grade N2) ➢ Filter: CNF1004USG4 (Nihon Pall) ➢ Regulator: SQMICRO (VERIFLO) ➢ Filter (N2): SQMICRO (VERIFLO) ➢ Valve: Primary side (Utility-MFC): Mega mini (FUJIKIN) ➢ Valve: Secondary side (MFC-PC): Mega one (FUJIKIN) ➢ Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box) ➢ Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type) ➢ Final Pressure Switch: 51A (MKS) ➢ Pressure Gauge: Bourdon Gauge (with inside finishing) ➢ Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa ➢ SP3 Gas Line Connection: No ➢ Chiller: Shinwa CH2-DC-2T2 Qty. 4 ➢ RF Generator Top: Daihen AGA-50B2 Qty. 4 ➢ RF Generator Bottom: Daihen WGA-50E Qty. 4 ➢ Gas line 1- N2 1000 sccm-AERA FCD985CT-BF ➢ Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF ➢ Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF ➢ Gas line 4- O2 50 sccm-AERA FC-D985CT-BF ➢ Gas line 5- CH2F2 100 sccm-AERA FC-D985CT-BF ➢ Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF ➢ Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF ➢ Gas line 8- C4F8 50 sccm- AERA FC-D985CT-BF ➢ Gas line 9- C3F8 50 sccm- AERA FC-D985CT-BF ➢ Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF ➢ Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF ➢ Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF ➢ Gas line 13- C4F8 20 sccm-AERA FC-D985CT-BF ➢ Gas line 14- C4F6 20 sccm-AERA FC-D985CT-BF ➢ Gas line 15- HeO2 50 sccm-AERA FC-D985CT-BF ➢ Gas line 16- Ar 100 sccm-AERA FC-D985CT-BF
    OEM 모델 설명
    Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.
    문서

    문서 없음

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    verified-listing-icon

    검증됨

    카테고리
    Dry / Plasma Etch

    마지막 검증일: 60일 이상 전

    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    104265


    웨이퍼 사이즈:

    12"/300mm


    빈티지:

    2008


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    유사 등재물
    모두 보기
    TEL / TOKYO ELECTRON TELIUS SP 305 SCCM

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    Dry / Plasma Etch
    빈티지: 2008조건: 중고
    마지막 검증일60일 이상 전

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    verified-listing-icon
    검증됨
    카테고리
    Dry / Plasma Etch
    마지막 검증일: 60일 이상 전
    listing-photo-2cae3997c3084f728ad6b4feb46af12e-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/77242/2cae3997c3084f728ad6b4feb46af12e/f80460457ff8447895b140b304442540_11223ac831234b3086afa70966e6e8cb1201a_mw.jpeg
    listing-photo-2cae3997c3084f728ad6b4feb46af12e-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/77242/2cae3997c3084f728ad6b4feb46af12e/ed83ee3a52dd458ea426fcc6f8482f2c_d4b76ed5d3334b7ca51f507a526402e31201a_mw.jpeg
    listing-photo-2cae3997c3084f728ad6b4feb46af12e-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/77242/2cae3997c3084f728ad6b4feb46af12e/0816ecedac124e2eb2e653d9daab5bab_dd568f2d59274f378653fc508e2f9e471201a_mw.jpeg
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    listing-photo-2cae3997c3084f728ad6b4feb46af12e-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/77242/2cae3997c3084f728ad6b4feb46af12e/def606c8e43c495cbdad12d5d5eb86d7_1d55e479af4d4359a5f99a6dcf049dc31201a_mw.jpeg
    listing-photo-2cae3997c3084f728ad6b4feb46af12e-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/77242/2cae3997c3084f728ad6b4feb46af12e/5d72e9ff95524cad9fc463a4d9e8aedf_e509c291169a4449a116cc3a0ed2afe81201a_mw.jpeg
    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    104265


    웨이퍼 사이즈:

    12"/300mm


    빈티지:

    2008


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    설명
    Process: Oxide Etch No HDD
    환경 설정
    TEL Telius SP-305 SCCM ➢ 4 Chambers ➢ 5 Load Ports ➢ Turbo Pumps: Shidmazhu TMP-3403LMC-T4(VG300) (Qty.4) ➢ FOUP Opener: SELOP 12F25-30U-14 ➢ Purge: N2 (Process Grade N2) ➢ Filter: CNF1004USG4 (Nihon Pall) ➢ Regulator: SQMICRO (VERIFLO) ➢ Filter (N2): SQMICRO (VERIFLO) ➢ Valve: Primary side (Utility-MFC): Mega mini (FUJIKIN) ➢ Valve: Secondary side (MFC-PC): Mega one (FUJIKIN) ➢ Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box) ➢ Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type) ➢ Final Pressure Switch: 51A (MKS) ➢ Pressure Gauge: Bourdon Gauge (with inside finishing) ➢ Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa ➢ SP3 Gas Line Connection: No ➢ Chiller: Shinwa CH2-DC-2T2 Qty. 4 ➢ RF Generator Top: Daihen AGA-50B2 Qty. 4 ➢ RF Generator Bottom: Daihen WGA-50E Qty. 4 ➢ Gas line 1- N2 1000 sccm-AERA FCD985CT-BF ➢ Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF ➢ Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF ➢ Gas line 4- O2 50 sccm-AERA FC-D985CT-BF ➢ Gas line 5- CH2F2 100 sccm-AERA FC-D985CT-BF ➢ Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF ➢ Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF ➢ Gas line 8- C4F8 50 sccm- AERA FC-D985CT-BF ➢ Gas line 9- C3F8 50 sccm- AERA FC-D985CT-BF ➢ Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF ➢ Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF ➢ Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF ➢ Gas line 13- C4F8 20 sccm-AERA FC-D985CT-BF ➢ Gas line 14- C4F6 20 sccm-AERA FC-D985CT-BF ➢ Gas line 15- HeO2 50 sccm-AERA FC-D985CT-BF ➢ Gas line 16- Ar 100 sccm-AERA FC-D985CT-BF
    OEM 모델 설명
    Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.
    문서

    문서 없음

    유사 등재물
    모두 보기
    TEL / TOKYO ELECTRON TELIUS SP 305 SCCM

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    Dry / Plasma Etch빈티지: 2008조건: 중고마지막 검증일:60일 이상 전
    TEL / TOKYO ELECTRON TELIUS SP 305 SCCM

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    Dry / Plasma Etch빈티지: 0조건: 중고마지막 검증일:5일 전
    TEL / TOKYO ELECTRON TELIUS SP 305 SCCM

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    Dry / Plasma Etch빈티지: 2007조건: 중고마지막 검증일:5일 전