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환경 설정

Canon FPA 2500 I3 - I-line Stepper 200mm convertible: Yes Dimensions & weight estimates: Mainframe dim (cm): 224 x 255 x 250 Mainframe weight (kg): 3500 Bypack1 dim (cm): 60 x 95 x 177 Bypack2 dim (cm): 66 x 85 x 200 Bypack3 dim (cm): 62 x 64 x 193

OEM 모델 설명

FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5